Assunto em inglês
Thin films
8
Magnetron sputtering
3
Reactive magnetron sputtering
3
Magnetron sputtering reativo
2
Oxidation
2
High temperature deposition
1
Magnetron sputering
1
Nanohardness
1
Niobium nitride
1
Oxidation resistance
1
Silicon nitride
1
Solid particle erosion
1
Solid solution
1
Sputtering
1
Structural modification
1
Zirconium nitride
1