Assunto em inglês
Thin films
Magnetron sputtering
3
Reactive magnetron sputtering
3
Magnetron sputtering reativo
2
Oxidation
2
Difration
1
High temperature deposition
1
Magnetic materials
1
Magnetic measurements
1
Magnetism
1
Magnetron sputering
1
Nanohardness
1
Niobium nitride
1
Oxidation resistance
1
Silicon nitride
1
Solid particle erosion
1
Solid solution
1
Sputtering
1
Structural modification
1
X-rays
1
Zirconium nitride
1