Assunto em inglês
Thin films
7
Magnetron sputtering
4
Reactive magnetron sputtering
3
Magnetron sputtering reativo
2
Nanohardness
2
Niobium nitride
2
Oxidation
2
Sputtering
2
Aluminum
1
Corrosion tests
1
Cr/TiN multilayers
1
High temperature deposition
1
High temperature oxidation
1
Magnetron sputering
1
Oxidation resistance
1
Silicon nitride
1
Solid solution
1
Structural modification
1
Zirconium nitride
1